Murarka, Shyam P.

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MURARKA, Shyam P. American (born India), b. 1940. Genres: Engineering. Career: Bell Laboratories, Murray Hill, NJ, supervisor in materials technology, 1972-84; Rensselaer Polytechnic Institute, Troy, NY, professor of materials engineering, 1984-, director of Center for Integrated Electronics and Electronics Manufacturing, and technical director of New York Sematech Center of Excellence, and professor of Materials engineering. Publications: Silicides for VLSI Applications, 1983; (with M. Peckerar) Electronic Materials, Science, and Technology, 1989; Metallization: Theory and Practice for VLSI and ULSI, 1993; (with J.M. Steigerwald and R.J. Gutmann) Chemical Mechanical Planarization of Microelectronic Materials, 1997; (with I.V. Verner and R.J. Gutmann) Copper: Fundamental Mechanisms for Microelectronic Applications, 2000. Co-editor of seven books for Materials Research Society, Pittsburgh, 1990-98. Contributor to scientific journals. Address: Rensselaer Polytechnic Institute, CII 6015, Troy, NY 12180, U.S.A.