Dutch Inventors Develop Immersion Lithographic Apparatus

US Fed News Service, Including US State News | July 29, 2008 | Copyright

ALEXANDRIA, Va., July 29 -- Hans Jansen and Jan-Gerard Cornelis Van Der Toorn, both of Eindhoven, Netherlands, and Patricius Aloysius Jacobus Tinnemans of Hapert, Netherlands, have developed a lithographic device.

According to the U.S. Patent & Trademark Office: "The present invention relates to the method of reducing contamination of an immersion liquid in a lithographic apparatus when a closing surface is used to confine liquid in a liquid supply system. To avoid or reduce particulate contamination caused by the closing surface colliding with the liquid supply system, the closing ...

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