Idaho Inventors Develop Rough Ruthenium-Containing Layer Forming Method

US Fed News Service, Including US State News | December 7, 2006 | Copyright

ALEXANDRIA, Va., Dec. 7 -- Garo Derderian and Vishnu K. Agarwal, both of Boise, Idaho, have developed a method for forming a rough ruthenium-containing layer on the surface of a substrate assembly that includes a ruthenium-containing precursor into the reaction chamber.

According to the U.S. Patent & Trademark Office: "A rough ruthenium layer may be deposited on the surface of the substrate assembly at a rate of about 100 Angstrom (ANG)/minute to about 500 ANG/minute using the ruthenium-containing precursor. Further, a rough ruthenium oxide layer may be formed by providing a ...

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