FROM THE EDITOR: MEMS GAS SENSORS ARE BEGINNING TO MAKE INROADS IN DIVERSE HIGH-VOLUME APPLICATIONS.(Editorial)

From: Sensor Business Digest | Date: November 1, 2002 | Copyright information

Silicon micromachined sensors, which are made using equipment, processes, and techniques that are similar to those used for making semiconductors and integrated circuit devices, have captured a significant share of the markets for pressure sensors and accelerometers. Silicon-based sensors are also widely used for temperature sensing, and are making significant inroads in the automotive gyro market.

The gas sensor market, however, offers key opportunities for silicon micromachined, or MEMS (microelectromechanical systems), sensors. Such sensors can offer key benefits for ...

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