Crystallographic phase analysis of submicrometer particles by electron backscatter diffraction. (New Briefs).(Brief Article) Journal of Research of the National Institute of Standards and Technology | March 1, 2002 | COPYRIGHT 2002 National Institute of Standards and Technology. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information) Copyright

The characterization and identification of small particles are critical to advanced manufacturing methods in semiconductor, pharmaceutical, metallurgy, and ceramics, as well as environmental monitoring and homeland security. The chemical compound identification of particles is essential to the understanding, improvement and control of electronic device yield, near-net-shape processes, drug effectiveness, environmental particulate health effects, and trace-explosive-particle forensic analysis.

In collaboration with Sandia National Laboratory, NIST is developing ...

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