Experimental.(Hot embossing in microfabrication, part 1)(Statistical Data Included) Polymer Engineering and Science | March 1, 2002| | COPYRIGHT 2002 Society of Plastics Engineers, Inc. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information) Copyright

INTRODUCTION

In recent years, many polymer-based micro- and nano-fabrication techniques have been explored for applications in bio- and chemical-MEMS (Micro Electro Mechanical Systems) (1). Polymer-based materials offer a wide range of physical and chemical properties, and also have the advantages of low cost and good processability for mass production. In contrast, for many applications (particularly in the biomedical field), single crystal and polycrystalline silicon (Si) materials (which have been commonly used in this area) and the associated production methods ...

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