Optical Lithography as the Pink Bunny. (Lithography).(Brief Article)

Semiconductor International | January 1, 2002| | Copyright

Certainly, the industry knows that optical lithography has its limits and -- someday -- those limits will actually play out. But optical techniques continue to buck predictions, their capabilities moving past the 1 [micro]m mark, then past 0.5 [micro]m ... then past 0.01 [micro]m? In fact, a group at MIT's Lincoln Laboratory (Lexington, Mass.) has reported the optical fabrication of a 9 nm gate. It seems that optical lithography just keeps going...

The group had previously fabricated 25 nm gate length fully depleted SOI transistors, using 248 nm (KrF) lithography ...

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