SEMs probe beneath the surface.(scanning electron microscope)

Test & Measurement World | July 1, 2001| | Copyright

A scanning electron microscope shows surface features, but it also tells you what's inside a sample.

As the structural complexity of semiconductors increases, so does the need for accurate information that relates various components--and their chemical makeup--to one another. The image shown in Figure 1 provides an electron microscope's view of a sectioned semiconductor device. Electron microscopes provide high resolution, a large depth of focus, a wide field of view, and easy image interpretation. Measurements of minute features made by electron microscopes play key ...

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