High resolution/low voltage SEM.(scanning electron microscopes)

Advanced Materials & Processes | July 1, 1999| | Copyright

The recent commercial developments of LVSEM with field emission sources and new lens design permit the operation of the microscope at low voltage without a significant loss in primary electron beam size, brightness or resolution. Beam-sensitive materials and insulators can now be imaged at high resolution without any need for surface coating.

During the last ten years, considerable progress has been made towards improving the resolution of scanning electron microscopes (SEM). In particular, the area of low-voltage imaging, where electron energies are in the 0.2 to 5 ...

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