New crystallography study findings have been published by L.K. Chu and colleagues.

Electronics Newsweekly | June 10, 2009 | Copyright

"Excellent electrical performance has been achieved on Ge meta I-oxide-semiconductor (MOS) devices using molecular beam epitaxy (MBE)-deposited dielectrics of Al2O3/Y2O3 directly on Ge(1 0 0) without utilizing any interfacial layers, such as GeOxNy or Si. Slight Ge diffusion into Y2O3 was observed using in-situ X-ray photoelectron spectroscopy," investigators in Hsinchu, Taiwan report.

"The interface between Y2O3 and Ge is atomically smooth after a high-temperature anneal at 500 degrees C for 10 min as characterized using high-resolution transmission electron ...

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