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Ion Systems Partners With Hamamatsu Corporation to Develop Photon Ionization Technology for Static Charge Control.
Business Wire
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December 10, 1997
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COPYRIGHT 1997 Business Wire. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group.
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BERKELEY, Calif.--(BUSINESS WIRE)--Dec. 10, 1997--Anticipating the unique static charge control requirements associated with 300 mm semiconductor wafer manufacturing, Ion Systems announced a strategic partnership with Hamamatsu Corporation, a USA subsidiary of Hamamatsu Photonics.
The companies have agreed to work over the next two years to jointly develop photon ionization applications and market the products based on the soft x-ray technology ionizer developed by Hamamatsu Photonics for the semiconductor and flat panel display (FPD) manufacturing industries. ...
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