Fab-Wide SPR Speeds Yield Improvement.(Spatial pattern recognition)

From: Semiconductor International | Date: March 1, 2008 | Copyright information

Andrew Drozda-Freeman, Mike McIntyre, Mike Retersdorf and Chris Wooten, Advanced Micro Devices, Sunnyvale, Calif., www.amd.com; Prasad Bachiraju, Xin Song andLen LaBua, Rudolph Technologies Inc., Flanders, N.J., www.rudolphtech.com

Spatial pattern recognition (SPR) technology can speed the correction of yield-robbing problems. The challenge is to deploy a system capable of processing the enormous amount of data generated in modern fabs, and then organize it for fast and consistent problem solving.

Quickly identifying and correcting yield-robbing problems is critical to ...

Read all of this article with a FREE trial to HighBeam Research

Related newspaper, magazine, and trade journal articles from HighBeam Research

(Including press releases, facts, information, and biographies)

A model-based clustering approach to the recognition of the spatial defect patterns produced during semiconductor fabrication.(Report)
; ...Spatial defect pattern recognition is to detect...The spatial defect patterns are thought...detection of spatial defect patterns on semiconductor...studies on defect pattern recognition in semiconductor...networks for pattern recognition. ...
Research.(manufacture of integrated circuits and maintaining the quality)
; ...performing statistical analysis of defect patterns. The second addresses the problem...warranty-related costs. [ILLUSTRATION OMITTED] Defect patterns on semi-conductor wafers Seeing a...but also to extract information on defect patterns that provide valuable feedback for...
Pattern Recognition
; Pattern recognition methods have been applied to...chemical problems. In a typical pattern recognition study, samples are classified...three major subdivisions of pattern recognition methodology are discussed and...
Management Side of Engineering.(Brief Article)
; ...Highly automated applications of pattern recognition technology that can predict machine...management use the same type of pattern recognition technologies perfected in. military...recently. Whether or not the term pattern recognition technology is familiar to you, the...
Neuro-fuzzy Pattern Recognition: Methods in Soft Computing
; ...and Sushimita Mitra, Neuro-fuzzy Pattern Recognition: Methods in Soft Computing, Wiley...and techniques that are related to pattern recognition or classification. The focus is...their synergism, and their roles in pattern recognition are discussed in detail. Fuzzy set...
How soon is now?
; ...Gibson's Present Tense PATTERN RECOGNITION By William Gibson Putnam...As befits its title, Pattern Recognition invites the reader to...windshield of the present," Pattern Recognition may be his quintessential...
(book review)
; ...systems and their capabilities. Pattern recognition is the study of how computers can...recognize them when they appear again. Pattern recognition is a task at which humans excel...today, there is no core theory of pattern recognition, and there is no one best algorithm...
Statistical Pattern Recognition (2nd ed.).(Book Review)
; ...gives an introduction to statistical pattern recognition methods and theory. The author states...given to practical aspects of the pattern recognition problem, and there are numerous...practitioners in the 'field' of pattern recognition as well as researchers in the area...
The High Road to Process Control.
; ...Hence, the idea behind engaging pattern recognition in process control -- or anyplace...of both worlds can be attained. Pattern recognition provides such a mechanism. Background...true at an equipment level, where a pattern recognition system is looking for parameter...
Gibson takes on 2003 SF master's new novel treats our pop culture
; PATTERN RECOGNITION BY WILLIAM GIBSON PUTNAM. $25...Today's world, as pictured in Pattern Recognition, his newest novel, is not without...their vices. But the present of Pattern Recognition doesn't demonstrate the anarchic...