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Bevel Cleaning System.
From:
Semiconductor International
| Date:
January 1, 2008
| COPYRIGHT 2008 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group.Copyright information
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Staff
The Coronus is a plasma-based bevel cleaning system designed to reduce yield loss caused by defects that originate near the wafer's edge. The system combines the multiple material cleaning capability of plasma with a confinement technology that protects the die area. It...
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