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Diffuser Technology.
From:
Semiconductor International
| Date:
June 15, 2007
| COPYRIGHT 2007 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group.Copyright information
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By Staff
Chambergard technology increases wafer throughput by reducing loadlock vent-up time for deposition and etch tools. It uses 0.003 A[micro]m filtration to maximize the vol...
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