Applying Motion Control.(in the semiconductor fabrication) From: Control Engineering | Date: October 1, 2006| Author: | COPYRIGHT 2006 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information) Copyright information

Kevin Steele

Drives and controls in semiconductor fabrication require precision, repeatability.

When Arthur C. Clarke remarked that any sufficiently advanced technology is indistinguishable from magic, he may have had semiconductor fabrication in mind, right up there with nuclear physics. Chips on the edge have features only a few atoms wide (some 65 nm with those as small as 45 nm in the works) and are fabricated with processes that are increasingly complex. The motion control systems used in the manufacture of many chips are required to provide repeatable motion with ...

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