Physical vapor deposition.(TECH NOTES) From: Advanced Materials & Processes | Date: March 1, 2006 | COPYRIGHT 2006 ASM International. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group.Copyright information

Sputtering is a physical vapor deposition (PVD) process in which a material is transported from a source (target) to a substrate by means of the bombardment of the target by gas ions that have been accelerated by a high voltage. Atoms from the target are ejected by momentum transfer between the incident ions and the target. These ejected particles move across the vacuum chamber to be deposited on the substrate.

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In its simplest form, material is sputtered in a (noble) gas at low pressure (0.13 to 13 Pa, or 1 x [10.sup.-3] to 100 x [10.sup.-3] torr). In ...

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