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Successful large-area sputtering: cylindrical rotating magnetrons can provide controlled reactive sputtering on both large areas and high-volume products, while also minimizing arcing and anode problems.
Ceramic Industry
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September 1, 2003|
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COPYRIGHT 2003 BNP Media. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group.
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Magnetron sputtering, combined With an accurate control of process parameters and layer quality, has become one of the most important methods for depositing thin films. The technique involves bombarding a negatively biased target surface, which is positioned in a complex magnetic field, with an ionized gas. The gas causes metallic atoms to be ejected from the target and subsequently deposited on the substrate to be coated. In standard metallic sputtering, an inert gas, such as argon, is used. No chemical reaction occurs between the gas and the target particles, resulting in a ...
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