Accuracy of nanoscale pitch standards fabricated by laser-focused atomic deposition.

Journal of Research of the National Institute of Standards and Technology | March 1, 2003| | Copyright

The pitch accuracy of a grating formed by laser-focused atomic deposition is evaluated from the point of view of fabricating nanoscale pitch standard artifacts. The average pitch obtained by the process, nominally half the laser wavelength, is simply traceable with small uncertainty to an atomic frequency and hence can be known with very high accuracy. An error budget is presented for a Cr on sapphire sample, showing that a combined standard uncertainty of 0.0049 nm, or a relative uncertainty of 2.3 [10.sup.-5], is readily obtained, provided the substrate temperature does not ...

Read all of this article with a FREE trial to HighBeam Research

Related newspaper, magazine, and trade journal articles from HighBeam Research

(Including press releases, facts, information, and biographies)

Luxor: the largest open-air museum in the world.(MOSAIC)
Magazine article from: The Middle East ; ...ridiculous heat--over the many wonders across Luxor, the city's residents are busy preparing...the Nile--home to the famed Karnak and Luxor temples--as early as 5am, depending...says, has been improving, he and many of Luxor's 200,000 residents are frustrated...
Luxor Resort and Casino to Be Home to Third Season of 'Criss Angel MINDFREAK' on A&E Network.
PR Newswire ; ...LAS VEGAS, Oct. 31 /PRNewswire/ -- Luxor Resort & Casino will be the home...numerous attractions and features of the Luxor Resort & Casino as well as various...MIRAGE properties. "I am so happy to call Luxor Resort & Casino home for my third...
LUXOR
Magazine article from: Middle East ; ...ridiculous heat - over the many wonders across Luxor, the city's residents are busy preparing...the Nile -home to the famed Karnak and Luxor temples - as early as 5am, depending on...says, has been improving, he and many of Luxor's 200,000 residents are frustrated...
Palladon Ventures and Luxor Capital Group Reach Agreement to Extend Maturity of Loans Due June 26, 2009.
News Wire article from: Canadian Corporate News ; ...the Company has executed an agreement (the Extension Agreement ) with Luxor Capital Group, LP ( Luxor ), to extend the term of the Company's two loans payable to Luxor in the current aggregate amount (including principal and accrued interest...
Luxor Opens First Phase of Expansion
PR Newswire ; ...pharaohs, and bellydancers tonight as Luxor Las Vegas celebrates the completion of...pyramid. The 22-story addition brings Luxor's total room count to 4,427, making...A moving walkway that now connects Luxor with its medieval-themed neighbor, Excalibur...
LINK Development Presents Luxor Portal to the World
Newspaper article from: Al Bawaba ; LINK Development Presents Luxor Portal to the World Extended range of...world who wish to find out more about Luxor before their visit to this city of wonders...and information with the launch of the Luxor portal, developed and designed by LINK...
Luxor Developments Inc. Announces Proposed Acquisition of Amorfix Life Sciences Ltd.
News Wire article from: Canadian Corporate News ; ...ALBERTA, Sep 21, 2004 (CCNMatthews via COMTEX) Luxor Developments Inc. ("Luxor") announces effective September 10, 2004 that...headquartered in Toronto, Ontario and at arm's length to Luxor. This proposed acquisition of Luxor of the securities...
LINK Development Presents Luxor Portal to the World.(Link Development Corp.)
News Wire article from: Albawaba.com ; ...the world who wish to find out more about Luxor before their visit to this city of wonders...and information with the launch of the Luxor portal, developed and designed by LINK...Microsoft Egypt. LINK Development Presents Luxor Portal to the World Extended range of online...
First National Financial Corporation Commits to Exceptional Customer Service with Luxor CRM.
PR Newswire ; ...Corporation has chosen its highly acclaimed Luxor CRM web-based Customer Relationship Management...the effectiveness of its sales force. Luxor CRM will provide First National's account...service. That is where a solution like Luxor CRM comes in. Luxor CRM is easy to use...
Luxor Las Vegas Lights Up The Sky With New Technology For The New Year
PR Newswire ; ...Eve celebrations on the Las Vegas Strip, Luxor Las Vegas will light up the sky when it...that will make the outline of the famed Luxor pyramid visible within a 50-mile radius...and 2,000 computer chips to illuminate Luxor. The system can create 150 special effects...

Find more facts and information related to the article "Accuracy of nanoscale pitch standards fabricated ..."